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Transient evolution of the target erosion profile during magnetron sputtering: dependence on gas pressure and magnetic configuration

Article reference
SCT21910
Journal
Surface & Coatings Technology
Corresponding author
Takeo Nakano
First author
Takeo Nakano
Received at Editorial Office
28 Sep 2016
Article revised
13 Dec 2016
Article accepted for publication
15 Dec 2016
DOI
10.1016/j.surfcoat.2016.12.053

Last update:  30 Aug 2017


Bibliographic information

Volume/Issue
326PB
Full bibliographic details
Surface & Coatings Technology 326PB (2017) pp. 436-442
Final article available online

24 Aug 2017

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Status comment

  • The printed version of the issue in which your article is compiled has been shipped to subscribers.

Production events

Date Event Help
30 Aug 2017 Printed journal shipped to subscribers
24 Aug 2017 The Share Link has been sent to you
24 Aug 2017 Final version of your article published online
4 Jan 2017 Corrected proof of your article published online
26 Dec 2016 Your proof corrections have been returned to Elsevier
26 Dec 2016 Colour order form completed by you
26 Dec 2016 Offprint order form completed by you
19 Dec 2016 Article published online
19 Dec 2016 Rights & Access form completed by you
19 Dec 2016 Rights & Access form sent to you for completion
19 Dec 2016 Colour order form sent to you for completion
19 Dec 2016 Offprint order letter sent to you for completion
15 Dec 2016 Received for production

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